Compound, (co)polymer, composition, method for forming resist pattern, method for producing compound, and method for producing (co)polymer
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsTadashi Omatsu, Masahiro Matsumoto, Michihiro Yuri, Kentaro Kataoka, Takashi Sato, Masatoshi Echigo
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Abstract
An iodine-containing (meth)acrylate compound represented by formula (1): wherein R1 represents a hydrogen atom, methyl, or halogen; each R2 independently represents a hydrogen atom, a linear organic group having 1 to 20 carbon atoms, a branched organic group having 3 to 20 carbon atoms, or a cyclic organic group having 3 to 20 carbon atoms; A represents an organic group having 1 to 30 carbon atoms; A contains at least one acyl group; n1 represents 0 or 1; and n2 represents an integer of 1 to 20.
Claims15
An iodine-containing (meth) acrylate compound represented by formula (1):
- wherein
- R1 represents a hydrogen atom, a methyl group, or halogen;
- each R2 independently represents a hydrogen atom, a linear organic group having 1 to 20 carbon atoms, a branched organic group having 3 to 20 carbon atoms, or a cyclic organic group having 3 to 20 carbon atoms;
- A is adamantane or benzene having at least one acetoxy group;
- n1 represents 0 or 1;
- and
- n2 represents an integer of 1 to 20.
An iodine-containing (meth) acrylate (co) polymer comprising a constituent unit represented by formula (4):
- wherein
- R1 represents a hydrogen atom, a methyl group, or halogen;
- each R2 independently represents a hydrogen atom, a linear organic group having 1 to 20 carbon atoms, a branched organic group having 3 to 20 carbon atoms, or a cyclic organic group having 3 to 20 carbon atoms;
- A is adamantane or benzene having at least one acetoxy group;
- n1 represents 0 or 1;
- n2 represents an integer of 1 to 20;
- and
- the symbol * represents a bonding site to an adjacent constituent unit.
Dependencies are inferred from the claim text.