Inspection system and inspection method
AssigneesNuctech Company Limited, Tsinghua University
InventorsZhiqiang Chen, Li Zhang, Qingping Huang, Yong Zhou, Hui Ding, Xin Jin, Chao Ji
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AssigneesNuctech Company Limited, Tsinghua University
InventorsZhiqiang Chen, Li Zhang, Qingping Huang, Yong Zhou, Hui Ding, Xin Jin, Chao Ji
Estimating the term…
An inspection system, including: at least one ray source rotatable between at least two scanning positions around a rotation axis, and a rotation angle of at least one ray source between two adjacent scanning positions is greater than an angle of adjacent target spots of each ray source relative to the rotation axis; a detector assembly, and a conveying device configured to carry an object to be inspected. At least one ray source and the detector assembly are movable in a traveling direction relative to the conveying device, so that the object to be inspected may enter an inspection region. When at least one ray source is located at one scanning positions, at least one ray source and the detector assembly move in the traveling direction relative to the conveying device and at least one ray source emits X-rays; after moving a predetermined distance, at least one ray source rotates around the rotation axis to another scanning position.
An inspection system, comprising:
An inspection method, comprising:
Dependencies are inferred from the claim text.