Detection substrate and ray detector
AssigneesBeijing BOE Sensor Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsJianxing Shang, Zhenyu Wang, Zhenwu Jiang, Liyou Xiao
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Abstract
The disclosure provides a detection substrate and a ray detector, the detection substrate including a base substrate, an average atomic number of a material used for the base substrate being less than 30, a ray mass attenuation coefficient of the material used for the base substrate being positively correlated with power of 3-4 of the average atomic number, and the base substrate including a ray incident side; a photodiode on a side of the base substrate, and the side of the base substrate with the photodiode facing away from the ray incident side; and a scintillator layer on a side of the layer of the photodiode away from the base substrate.
Claims14
A detection substrate, comprising:
- a base substrate, wherein an average atomic number of a material used for the base substrate is less than 30, a ray mass attenuation coefficient of the material used for the base substrate is positively correlated with power of 3-4 of the average atomic number, and the base substrate comprises a ray incident side;
- a photodiode on a side of the base substrate, wherein the side of the base substrate with the photodiode faces away from the ray incident side;
- and
- a scintillator layer, on a side of a layer of the photodiode away from the base substrate;
- wherein the detection substrate further comprises a first planarization layer between a layer of the photodiode and the base substrate;
- wherein the photodiode comprises a first electrode, a photovoltaic conversion material layer and a second electrode arranged in stack, and the second electrode is adjacent to the scintillator layer;
- wherein the detection substrate further comprises a driving circuit, wherein
- a layer of the driving circuit is disposed between the base substrate and the first planarization layer;
- and
- the driving circuit is electrically connected with the first electrode through a via running through the first planarization layer.
A ray detector, comprising a detection substrate and a ray source, wherein the detection substrate comprises:
- a base substrate, wherein an average atomic number of a material used for the base substrate is less than 30, a ray mass attenuation coefficient of the material used for the base substrate is positively correlated with power of 3-4 of the average atomic number, and the base substrate comprises a ray incident side;
- a photodiode on a side of the base substrate, wherein the side of the base substrate with the photodiode faces away from the ray incident side;
- and
- a scintillator layer, on a side of a layer of the photodiode away from the base substrate;
- and rays emitted by the ray source irradiate into the detection substrate from the ray incident side;
- wherein the detection substrate further comprises a first planarization layer between a layer of the photodiode and the base substrate;
- wherein the photodiode comprises a first electrode, a photovoltaic conversion material layer and a second electrode arranged in stack, and the second electrode is adjacent to the scintillator layer;
- wherein the detection substrate further comprises a driving circuit, wherein
- a layer of the driving circuit is disposed between the base substrate and the first planarization layer;
- and
- the driving circuit is electrically connected with the first electrode through a via running through the first planarization layer.
Dependencies are inferred from the claim text.