Back to results
US 12,699,136 B2Granted
Apparatus and test element group
AssigneeMicron Technology, Inc.
InventorFumie Uchida
Life of this patent
Estimating the term…
Abstract
According to one or more embodiments of the disclosure, an apparatus comprising a plurality of active regions on a semiconductor substrate, an active bridge region connecting two active regions among the plurality of active regions, and a plurality of test circuit elements on the active bridge region and the two active regions.
Claims20
An apparatus, comprising:
- a plurality of active regions on a semiconductor substrate;
- an enlarged active region including an active bridge region and at least two adjacent active regions connected by the active bridge region among the plurality of active regions, wherein the enlarged active region is greater in size, at least in a plan view, than other active regions adjacent to the enlarged active region among the plurality of active regions;
- and
- a plurality of test circuit elements on the enlarged active region.
1 more element
An apparatus, comprising:
- a plurality of active regions arranged in matrix in a scribe region on a semiconductor substrate;
- an active bridge region physically connecting at least first and second active regions arranged adjacently among the plurality of active regions, the active bridge region and the at least first and second active regions forming an enlarged active region at least in a first horizontal direction in a plan view, wherein the enlarged active region has a first horizontal-direction size greater than a third active region adjacent to the enlarged active region among the plurality of active regions;
- and
- a plurality of test circuit elements on the enlarged active region, the plurality of test circuit elements including two capacitance contacts or two bit contacts electrically connected to each other by the enlarged active region.
1 more element
A test element group in a scribe region on a semiconductor substrate, comprising:
- a plurality of active regions in the scribe region, including:
- an enlarged active region as a combination of an active bridge region and two adjacent active regions connected by the active bridge region among the plurality of active regions;
- and
- a non-bridged active region adjacent to the active bridge region among the plurality of active regions, wherein the enlarged active region is greater in size than the non-bridged active region at least in a plan view;
- and
- a plurality of test circuit elements on the enlarged active region.
3 more elements
Dependencies are inferred from the claim text.