Analysis apparatus, analysis method, and analysis program
AssigneeRigaku Corporation
InventorYoshiyasu Ito
Life of this patent
Estimating the term…
Abstract
An analysis apparatus includes processing circuitry configured to store data of a scattering intensity measured by transmission of X-rays in one ω scan, perform coordinate conversion from the coordinate of the scattering vector to the coordinate of the tilt of the scattering body, with respect to a waveform based on the intensity of a specific diffraction point on the two-direction components, specify a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion, and calculate a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample.
Claims18
An analysis apparatus for analyzing a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, comprising:
- processing circuitry configured to
- store data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one ω scan,
- acquire a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and perform coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity,
- specify a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion, and
- calculate a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.
An analysis method for a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, comprising:
- preparing data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one ω scan;
- acquiring a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and performing coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity;
- specifying a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion;
- and
- calculating a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.
A non-transitory computer readable recording medium having recorded thereon an analysis program for analyzing a fine structure of a plate-shaped sample formed to have columnar scattering bodies that are long in a thickness direction and periodically arranged, the program causing a computer to execute the following processes of:
- preparing data of a scattering intensity from the plate-shaped sample measured by transmission of X-rays in one w scan;
- acquiring a waveform of a scattering vector in the thickness direction of the plate-shaped sample at a specific diffraction point and performing coordinate conversion from the coordinate of the scattering vector in the thickness direction of the plate-shaped sample to the coordinate of the tilt of the scattering body, with respect to the waveform based on an intensity of the specific diffraction point on the two-direction components, using the data of the measured scattering intensity;
- specifying a peak position of the waveform of the intensity with respect to the coordinate of the tilt applied the coordinate conversion;
- and
- calculating a difference between the specified peak position and the peak position obtained on the assumption that the scattering body is not tilted from the direction perpendicular to the surface of the plate-shaped sample, on the two-direction components of the tilt of the scattering body.
Dependencies are inferred from the claim text.