Flexible pressure sensor

A flexible pressure sensor comprising:

• a lower structure;
• and
• an upper structure on the lower structure,
• wherein the lower structure comprises:
• a flexible substrate;
• and
• first electrodes on the flexible substrate and second electrodes spaced apart from the first electrodes, and
• the upper structure comprises:
• a support;
• first protrusion structures protruding from a bottom surface of the support;
• and
• second protrusion structures protruding from the bottom surface of the support, the second protrusion structures being spaced apart from the first protrusion structures,
• wherein each of the first protrusion structures has a first width in a first direction parallel to a top surface of the flexible substrate,
• each of the second protrusion structures has a second width in the first direction,
• the bottom surface of the support and a side surface of each of the first protrusion structures are angled at a first angle, and
• the bottom surface of the support and a side surface of each of the second protrusion structures are angled at a second angle,
• wherein the second protrusion structures vertically overlap the first and second electrodes,
• the first protrusion structures are in contact with a top surface of the flexible substrate,
• the second protrusion structures are vertically spaced apart from the first and second electrodes,
• wherein the first width is greater than the second width, and the first angle and the second angle are the same.