Inertial sensor with flexure arrangement and method
AssigneeSilicon Microgravity Limited
InventorsMadan Parajuli, Ashwin Seshia
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Abstract
An inertial sensor comprising; a central anchor; a proof mass, wherein the proof mass surrounds the central anchor; a flexure; and a plurality of electrodes is disclosed. The flexure has a shape comprising a first plurality of spiral arms, each winding about the central anchor in a first sense, and a second plurality of spiral arms, each winding about the central anchor in a second sense, the second sense being opposite to the first sense Each of the arms are connected between the central anchor and the proof mass. Advantageously, energy lost through anchor losses and thermoelastic dissipation are reduced in this arrangement, resulting in a higher quality factor for the modes of vibration.
Claims20
An inertial sensor comprising:
- a central anchor;
- a proof mass, wherein the proof mass surrounds the central anchor;
- a flexure, the flexure having a shape comprising a first set of spiral arms, the first set of spiral arms comprising a first plurality of N spiral arms and a second plurality of N spiral arms, where N is an integer greater than 1, each of the arms connected between the central anchor and the proof mass and lying in a first plane, each of the arms of the first plurality of N spiral arms winding about the central anchor in a first sense and each of the arms of the second plurality of N spiral arms winding about the central anchor in a second sense, the second sense being opposite to the first sense;
- and
- a plurality of electrodes comprising,
- at least one drive electrode for driving the proof mass in a first mode of vibration, and
- at least one sense electrode for sensing a response of the proof mass in a second mode of vibration.
Dependencies are inferred from the claim text.