Safety fence, transfer device including a safety fence and apparatus for processing a substrate including a safety fence

A transfer device comprising:

• a transfer part including transfer rails installed on a ceiling of a manufacturing line for an integrated circuit device and a transfer vehicle running along the transfer rails;
• and
• a safety fence disposed adjacent to the transfer part, the safety fence comprising:
• a plurality of first horizontal supporting portions disposed in parallel to the transfer rails;
• a plurality of second horizontal supporting portions connecting the plurality of first horizontal supporting portions to the transfer rails;
• a plurality of vertical supporting portions extended from the plurality of horizontal supporting portions, respectively;
• and
• a plate portion connected to the plurality of vertical supporting portions,
• wherein the safety fence is partially foldable and partially unfoldable
• each of the plurality of vertical supporting portion including an upper vertical supporting portion and a lower vertical supporting portion, and the upper vertical supporting portion and the lower vertical supporting portion are separable from each other.

An apparatus for processing a substrate comprising:

• a processing part disposed in a manufacturing line for an integrated circuit device, the processing part including a hinged door;
• and
• a transfer part including transfer rails installed on a ceiling of the manufacturing line and a transfer vehicle running along the transfer rails;
• and
• a safety fence disposed adjacent to the transfer part, the safety fence comprising:
• a plurality of first horizontal supporting portions disposed in parallel to the transfer rails;
• a plurality of second horizontal supporting portions connecting the plurality of first horizontal supporting portions to the transfer rails;
• a plurality of vertical supporting portions extended from the plurality of horizontal supporting portions, respectively;
• and
• a plate portion connected to the plurality of vertical supporting portions,
• wherein the safety fence is partially foldable such that the safety fence does not affect on an opening and closing of the door of the processing part
• each of the plurality of vertical supporting portion including an upper vertical supporting portion and a lower vertical supporting portion, and the upper vertical supporting portion and the lower vertical supporting portion are separable from each other.