Single crystal growth apparatus
AssigneeNovel Crystal Technology, Inc.
InventorsTakuya Igarashi, Yuki Ueda, Kimiyoshi Koshi
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AssigneeNovel Crystal Technology, Inc.
InventorsTakuya Igarashi, Yuki Ueda, Kimiyoshi Koshi
Estimating the term…
A single crystal growth apparatus to grow a single crystal of a gallium oxide-based semiconductor. The apparatus includes a crucible that includes a seed crystal section to accommodate a seed crystal, and a growing crystal section which is located on the upper side of the seed crystal section and in which the single crystal is grown by crystallizing a raw material melt accommodated therein, a tubular susceptor surrounding the seed crystal section and also supporting the crucible from below, and a molybdenum disilicide heating element to melt a raw material in the growing crystal section to obtain the raw material melt. The susceptor includes a thick portion at a portion in a height direction that is thicker and has a shorter horizontal distance from the seed crystal section than other portions. The thick portion surrounds at least a portion of the seed crystal section in the height direction.
A single crystal growth apparatus to grow a single crystal of a gallium oxide-based semiconductor, the single crystal growth apparatus comprising:
Dependencies are inferred from the claim text.