Paddle chamber with anti-splashing baffles
AssigneeApplied Materials, Inc.
InventorNolan L. Zimmerman
Life of this patent
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Abstract
Electroplating systems according to embodiments of the present technology may include a plating chamber configured to deposit metal material onto substrates positioned in the plating chamber. The plating chamber may include a rotor and a vessel. The electroplating systems may include at least one of baffle positioned in the plating chamber. The at least one baffle may define a plurality of slots. The at least one baffle may be configured to limit or prevent fluid from splashing the rotor or the plating chamber during operation of the plating chamber.
Claims16
A baffle configured to prevent fluid from splashing a rotor or a plating chamber during operation of the plating chamber, the baffle comprising:
- an arcuate body comprising a first lateral end, a second lateral end opposite the first lateral end, an inner lateral surface that extends from the first lateral end to the second lateral end, an outer lateral surface that extends from the first lateral end to the second lateral end, a top surface, and a bottom surface opposite the top surface, wherein the inner lateral surface is arcuate;
- a plurality of slots, wherein each of the plurality of slots extends through the top surface and the bottom surface of the body;
- and
- at least one mounting tab for attaching the baffle to the plating chamber.
Dependencies are inferred from the claim text.