Plasma resistant yttrium aluminum oxide body
AssigneeHeraeus Covantics North America LLC
InventorsLuke Walker, Saurav Bista, Matthew Joseph Donelon, Steven Roger Kennedy
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Abstract
Disclosed herein is a sintered ceramic body comprising from 90% to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17. The sintered ceramic body may have a total purity of 99.99% and greater and a grain size of from 0.3 to 8 μm. A method of making the sintered ceramic body is also disclosed.
Claims11
A sintered ceramic body comprising from 90 to 99.9% by volume of polycrystalline yttrium aluminum garnet (YAG) as measured using XRD and image processing methods and a volumetric porosity of from 0.1 to 4% as calculated from density measurements performed in accordance with ASTM B962-17, wherein the sintered ceramic body has a greatest dimension of from 350 mm to 622 mm and has an average hardness of from 13.5 to 14.5 GPa using an applied load of 0.2 kgf as measured in accordance with ASTM Standard C1327, wherein the average hardness is calculated from 8 measurements.
Dependencies are inferred from the claim text.