Laser crystallization apparatus
AssigneeSamsung Display Co., Ltd.
InventorsAkifumi Sangu, Je Kil Ryu, Cheol Ho Park, Hae Sook Lee, Jin Hong Jeun, Young Su Chae, Gyoo Wan Han
Life of this patent
Estimating the term…
Abstract
A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.
Claims19
A laser crystallization apparatus comprising:
- a light source configured to irradiate a laser beam;
- and
- an optical unit having a light receiving surface on which the laser beam is incident in an incident direction,
- wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface to form a single plano-convex cylindrical lens,
- a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam,
- the light receiving surface includes the first portion, the second portion, and the bonded surface,
- the light source and the optical unit are arranged such that the light source is configured to irradiate the laser beam continuously on the light receiving surface including the first portion, to the second portion, and the bonded surface,
- the bonded surface is configured to reduce an intensity of the laser beam, and
- the first portion and the second portion are bonded by optical contact bonding.
A laser crystallization apparatus comprising:
- a light source configured to irradiate a laser beam;
- and
- an optical unit to which the laser beam is incident in an incident direction and including a plurality of sub-optical units,
- wherein each of the plurality of sub-optical units includes a first portion and a second portion bonded to each other on a bonded surface to form a single plano-convex cylindrical lens,
- the plurality of sub-optical units are sequentially arranged based on a direction parallel to the incident direction of the laser beam, and
- the bonded surface is configured to reduce an intensity of the laser beam, and
- the first portion and the second portion are bonded by optical contact bonding.
A laser crystallization apparatus comprising:
- a light source configured to irradiate a laser beam;
- and
- an optical unit having a light receiving surface to which the laser beam is incident in an incident direction,
- wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface,
- the light receiving surface includes the first portion, the second portion, and the bonded surface,
- the light source and the optical unit are arranged such that the light source is configured to irradiate the laser beam continuously on the light receiving surface including the first portion, the second portion, and the bonded surface,
- the bonded surface is inclined to form a predetermined angle less than 45 degrees with the incident direction of the laser beam, and
- the bonded surface is configured to reduce an intensity of the laser beam, and
- the first portion and the second portion are bonded by optical contact bonding.
Dependencies are inferred from the claim text.