Ultrasonic atomization apparatus

An ultrasonic atomization apparatus comprising:

• a material solution container that has an internal space for containing a material solution and includes a mist output pipe at a top surface thereof;
• an ultrasonic transducer that is provided below the material solution container;
• a non-contact mist supply pipe that is provided above the material solution container including the mist output pipe without being in contact with the material solution container;
• a leakproof tank that is provided to be connected to the mist output pipe without being in contact with the non-contact mist supply pipe;
• and
• a weight measuring instrument that supports the material solution container from below and measures the weight of a measurement target including the material solution container, the ultrasonic transducer, the leakproof tank, and the material solution, wherein
• the material solution is misted by ultrasonic vibration operation of the ultrasonic transducer to generate material solution mist in the internal space,
• the non-contact mist supply pipe includes an overlapping pipe portion and a non-overlapping pipe portion other than the overlapping pipe portion, the overlapping pipe portion having a pipe overlapping region in which the overlapping pipe portion and an upper region of the mist output pipe overlap along a mist output direction, a pipe overlapping space being formed between the overlapping pipe portion and the upper region,
• a liquid containing space is formed between the leakproof tank and the mist output pipe, the liquid containing space containing a sealing liquid therein, the sealing liquid being present in the pipe overlapping space, the measurement target further including the sealing liquid, and
• the material solution mist flows in the mist output pipe and the non-contact mist supply pipe along the mist output direction and is output from the non-contact mist supply pipe.