Integrated circuit structure and manufacturing method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYung-Ching Chao, Wei-Han Chiang, Peng-Yuan Jung, Chin-Wei Kang, Cheng-Jen Lin
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Abstract
An integrated circuit structure includes a semiconductor substrate, a passivation layer, a first protective layer, and a second protective layer. The passivation layer is over the semiconductor substrate. The first protective layer is over the passivation layer. The second protective layer is over the first protective layer, wherein a boundary of the first protective layer is confined within the second protective layer.
Claims20
An integrated circuit structure, comprising:
- a semiconductor substrate;
- a passivation layer over the semiconductor substrate;
- a first protective layer over the passivation layer;
- a second protective layer over the first protective layer, wherein a boundary of the first protective layer is confined within the second protective layer;
- and
- a seal ring over a periphery of the semiconductor substrate, wherein the passivation layer covers the seal ring and comprises a protruded portion conforming to a contour of the seal ring, and the first protective layer is spaced apart from the protruded portion.
An integrated circuit structure, comprising:
- a semiconductor substrate;
- a passivation layer over the semiconductor substrate;
- a first protective layer over the passivation layer;
- a second protective layer over the first protective layer, wherein a boundary of the first protective layer is confined within the second protective layer;
- and
- a seal ring over a periphery of the semiconductor substrate, wherein the passivation layer covers the seal ring.
An integrated circuit structure, comprising:
- a semiconductor substrate;
- a conductive layer over the semiconductor substrate, wherein the conductive layer comprises a seal ring over a periphery of the semiconductor substrate;
- a passivation layer covering the seal ring in a conformal manner;
- a first protective layer over the passivation layer;
- and
- a second protective layer covering the first protective layer and an interface between the first protective layer and the passivation layer.
Dependencies are inferred from the claim text.