Piezoelectric actuator and microfluidic device
AssigneeAlbert-Ludwigs-Universität Freiburg
InventorsArdavan Shabanian, Hans Rainer Stork, Anjan Bhat Kashekodi, David Stork, Peter Woias, Frank Goldschmidtboing
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Abstract
A piezoelectric actuator includes a deflectable membrane and a piezoelectric element attached to a part of the deflectable membrane for exerting a mechanical force on the deflectable membrane. The piezoelectric element is operable to perform an expansion and a contraction motion depending on an electric field applied to the piezoelectric element. The piezoelectric element leaves open a central region of the deflectable membrane and has a peripheral outline that does not coincide with an outline of the deflectable membrane.
Claims45
A piezoelectric actuator, comprising:
- a deflectable membrane;
- and
- at least one piezoelectric element attached to a part of the deflectable membrane for exerting a mechanical force on the deflectable membrane, the piezoelectric element is operable to perform an expansion and a contraction motion depending on an electric field applied to the piezoelectric element, the piezoelectric element has a peripheral outline that does not coincide with an outline of the deflectable membrane, and
- wherein the piezoelectric actuator comprises an elastic support device for supporting the piezoelectric actuator.
A microfluidic device, comprising:
- a piezoelectric actuator including a deflectable membrane and at least one piezoelectric element attached to a part of the deflectable membrane for exerting a mechanical force on the deflectable membrane, the piezoelectric element is operable to perform an expansion and a contraction motion depending on an electric field applied to the piezoelectric element, the piezoelectric element has a peripheral outline that does not coincide with an outline of the deflectable membrane, and
- wherein the piezoelectric actuator comprises an elastic support device for supporting the piezoelectric actuator.
A piezoelectric actuator, comprising:
- a deflectable membrane being deflectable in two opposing directions;
- and
- at least a first piezoelectric element and at least a second piezoelectric element, attached to opposing surfaces of the deflectable membrane for exerting a mechanical force on the deflectable membrane, the piezoelectric elements being operable to perform an expansion and/or a contraction motion depending on electric fields applied to the piezoelectric elements,
- wherein an outer outline diameter of the first and/or the second piezoelectric elements, in at least a portion, is larger than an outer outline diameter of the deflectable membrane.
A microfluidic device, comprising:
- a piezoelectric actuator including a deflectable membrane being deflectable in two opposing directions;
- and
- at least a first piezoelectric element and at least a second piezoelectric element, attached to opposing surfaces of the deflectable membrane for exerting a mechanical force on the deflectable membrane, the piezoelectric elements being operable to perform an expansion and/or a contraction motion depending on electric fields applied to the piezoelectric elements,
- wherein an outer outline diameter of the first and/or the second piezoelectric elements, in at least a portion, is larger than an outer outline diameter of the deflectable membrane.
Dependencies are inferred from the claim text.