Electrical planarization of carbon nanotube thin films for electronic device applications
AssigneesUniversity of Florida Research Foundation, Inc., Mattrix Technologies, Inc.
InventorsAndrew Gabriel Rinzler, Rajib Kumar Das, Bo Liu, Max G. Lemaitre
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Abstract
Various examples are provided related to electrical planarization of carbon nanotube thin films or networks. In one example, a method includes depositing one or more thin protective organic and/or inorganic layer across a nanotube film; disrupting electrical conductance of portions of the nanotube film by exposure of out-of-plane nanotubes to a planarization process that disrupts the electrical conductance through the one or more thin protective organic and/or inorganic layer; and removing the one or more thin protective organic and/or inorganic layer from the nanotube film.
Claims23
A method for electrical planarization of nanotube films or networks, comprising:
- depositing one or more thin protective organic and/or inorganic layer across a nanotube film;
- disrupting electrical conductance of portions of the nanotube film by exposure of out-of-plane nanotubes to a planarization process that disrupts the electrical conductance through the one or more thin protective organic and/or inorganic layer;
- and
- removing the one or more thin protective organic and/or inorganic layer from the nanotube film.
Dependencies are inferred from the claim text.