Method of manufacturing a thin film of perovskite compound and method of manufacturing a solar cell using the same
AssigneeJusung Engineering Co., Ltd.
InventorsJaeHo Kim, Chul Joo Hwang
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AssigneeJusung Engineering Co., Ltd.
InventorsJaeHo Kim, Chul Joo Hwang
Estimating the term…
The present inventive concept relates to a method of manufacturing a thin film of a perovskite compound, including a process of reacting at least one compound selected from among an amine-based compound and an amidine-based compound, an organic metal compound including a divalent positive ion, and at least one hydrogen halide, and a method of manufacturing a solar cell using the same, and According to the present inventive concept, because a perovskite compound is manufactured by performing a reaction through a chemical vapor deposition (CVD) process and an atomic layer deposition (ALD) process, step coverage may be enhanced, and thus, it may be possible to form a thin film having a uniform thickness and a problem where a solvent remains may also be solved.
A method of manufacturing a thin film of a perovskite compound, the method comprising:
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