Vacuum sealed RF resonator cavity for LINAC
AssigneeApplied Materials, Inc.
InventorsWilliam H. Leavitt, William Herron Park, Jr., Jason M. Schaller
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Abstract
An RF resonator cavity that includes a resonator coil is disclosed. Unlike traditional RF resonator cavities, no sulfur hexafluoride is used in this cavity. Rather, the volume of the RF resonator cavity is pumped to vacuum conditions. This may be done using a vacuum system, or by hermetically sealing the cavity. This approach eliminates the use of a potent greenhouse gas, while maintaining the integrity of the cavity. Specifically, the dielectric strength of the vacuum is greater than that of sulfur hexafluoride. This RF resonator cavity may be deployed in a linear accelerator used to implant ions into a workpiece.
Claims11
An ion implanter, comprising:
- an ion source;
- and
- a linear accelerator, wherein the linear accelerator comprises one or more RF resonator cavities, wherein each RF resonator cavity is defined by a container, wherein a resonator coil and an excitation coil are disposed in each respective RF resonator cavity, and wherein the container is hermetically sealed and a pressure within the container is less than 1E-5 Torr and sulfur hexafluoride is not disposed in the container.
An ion implanter, comprising:
- an ion source to generate ions;
- and
- a linear accelerator, wherein the linear accelerator comprises one or more RF resonator cavities, wherein each RF resonator cavity is defined by a container, wherein a resonator coil and an excitation coil are disposed in each respective RF resonator cavity, wherein the ions pass through an aperture in an accelerator electrode that is located outside the RF resonator cavity and further comprising a vacuum system in communication with each RF resonator cavity to pump air from the RF resonator cavity to an atmospheric environment, such that a pressure within the container is less than 1 mTorr.
Dependencies are inferred from the claim text.