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US 12,695,198 B2Granted
Terahertz transceiver including triple-barrier resonant tunneling diode
AssigneeNational Tsing Hua University
InventorsWei-Chih Wang, Karthikraj Muthuramalingam, Fiona Marie Wang
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Abstract
The present disclosure provides a terahertz (THz) transceiver including a triple-barrier resonant tunneling diode (TBRTD), a resonator antenna electrically connected to an emitter and a collector of the TBRTD, and a radiator antenna disposed over the resonator antenna and vertically aligned with the resonator antenna for reducing a system size. A corresponding method of fabricating the THz transceiver is also provided.
Claims20
A terahertz (THz) transceiver, comprising:
- a triple-barrier resonant tunneling diode (TBRTD) with an emitter layer and a collector layer;
- a resonator antenna electrically connected to the emitter layer and the collector layer of the TBRTD;
- a spacer layer disposed on the resonator antenna;
- and
- a radiator antenna disposed on the spacer layer,
- wherein the spacer layer separates the resonator antenna and the radiator antenna, and
- wherein the resonator antenna and the radiator antenna are vertically aligned and inductively coupled.
4 more elements
A method of fabricating a terahertz (THz) transceiver, comprising:
- forming a triple-barrier resonant tunneling diode (TBRTD) with an emitter layer and a collector layer,
- forming a resonator antenna electrically connected to the emitter layer and the collector layer of the TBRTD;
- forming a spacer layer disposed on the resonator antenna;
- and
- forming a radiator antenna disposed on the spacer layer,
- wherein the spacer layer separates the resonator antenna and the radiator antenna, and
- wherein the resonator antenna and the radiator antenna are vertically aligned and inductively coupled.
4 more elements
Dependencies are inferred from the claim text.