Wire bonding apparatus and control method
AssigneeHirata Corporation
InventorToru Miyazaki
Life of this patent
Estimating the term…
Abstract
A wire bonding apparatus includes a conveying unit configured to convey a pallet on which a work is placed, at least one bonding head configured to perform wire bonding for the work, and a moving unit configured to move the at least one bonding head. The conveying unit includes a first conveying unit configured to convey the pallet to a work region, and a second conveying unit configured to convey the pallet in the work region. The second conveying unit includes a table with a positioning unit configured to positioning the pallet, a second moving mechanism configured to repeat moving the table and stopping the table. A positioning state of the pallet by the positioning unit is kept while the pallet is conveyed, and the at least one bonding head performs work for the work.
Claims16
A wire bonding apparatus comprising:
- a conveying unit configured to convey in a first direction a pallet on which a work is placed;
- at least one bonding head configured to perform wire bonding for the work;
- and
- a moving unit configured to move the at least one bonding head,
- the moving unit including
- a beam member located above the conveying unit and extending in a second direction intersecting the first direction so as to cross the conveying unit,
- a first columnar member configured to support one end portion of the beam member,
- a second columnar member configured to support the other end portion of the beam member, and
- a first moving mechanism configured to be supported on the beam member and move the at least one bonding head in the second direction,
- the conveying unit including
- a first conveying unit configured to convey the pallet to a work region where the at least one bonding head performs work for the work, and
- a second conveying unit configured to convey the pallet in the work region,
- the second conveying unit including
- a table with a positioning unit configured to positioning the pallet,
- a second moving mechanism configured to repeat moving the table in the first direction and stopping the table,
- wherein the at least one bonding head performs work for the work placed on the pallet located in the work region while the second moving mechanism stops, and
- wherein a positioning state of the pallet by the positioning unit is kept while the pallet is conveyed by the second conveying unit, and the at least one bonding head performs work for the work.
A control method of a wire bonding apparatus including:
- a conveying unit configured to convey in a first direction a pallet on which a work is placed;
- at least one bonding head configured to perform wire bonding for the work;
- and a moving unit configured to move the at least one bonding head, the moving unit including:
- a beam member located above the conveying unit and extending in a second direction intersecting the first direction so as to cross the conveying unit;
- a first columnar member configured to support one end portion of the beam member;
- a second columnar member configured to support the other end portion of the beam member;
- and a first moving mechanism supported on the beam member and configured to move the at least one bonding head in the second direction, the conveying unit including:
- a first conveying unit configured to convey the pallet to a work region where the at least one bonding head performs work for the work;
- and a second conveying unit configured to convey the pallet in the work region, the second conveying unit including:
- a table with a positioning unit configured to positioning the pallet;
- and a second moving mechanism configured to repeat moving the table in the first direction and stopping the table, the method comprising
- a first conveying step of conveying the pallet to the work zone by the first conveying unit,
- a positioning step of positioning the pallet conveyed in the work zone by the positioning unit,
- a working step of working, by the at least one bonding head, the work placed on the pallet positioned by the positioning unit,
- a moving step of moving, by the second moving mechanism, the pallet in a state in which the positioning unit positions the pallet,
- a stop step of stopping moving the pallet by the second moving mechanism while the positioning unit positions the pallet,
- a cancel step of cancelling positioning of the pallet by the positioning unit after the working step, the moving step and the stop step are repeated multiple times, and
- a second conveying step of conveying the pallet by the first conveying unit outside the work zone.
Dependencies are inferred from the claim text.