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US 12,695,053 B2Granted
Self-referencing health monitoring system for multi-beam SEM tools
AssigneeASML Netherlands B.V.
InventorsWei Fang, Lingling Pu
Life of this patent
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Abstract
Systems and methods for image enhancement are disclosed. A method for enhancing an image may include receiving records of a performance metric for beams of the multi-beam system in an imaging process, each record associated with a beam. The method may also include determining whether an abnormality of a beam occurs based on a baseline value determined using a portion of the records. The method may further include providing an abnormality indication in response to the determination that the abnormality has occurred.
Claims15
A method for monitoring performance of a multi-beam system, the method comprising:
- monitoring a performance metric of at least two beams of a plurality of beams of the multi-beam system operating simultaneously during an imaging process, wherein the performance metric of the at least two beams comprises an image parameter or geometric distortion of a first image generated from the imaging process from a field of view (FOV) of a first beam the at least two beams of the plurality of beams and a second image generated from the imaging process of a FOV of a second beam of the at least two beams of the plurality of beams, and wherein the image parameter comprises a noise parameter, an image sharpness parameter, or a resolution parameter;
- receiving records of the performance metric of the plurality of beams of the multi-beam system operating during an imaging process, each record associated with a beam of the plurality of beams;
- calculating a baseline value of the performance metric of the plurality of beams from a portion of the records;
- determining whether an abnormality of the first beam of the at least two beams of the plurality of beams or the second beam of the at least two beams of the plurality of beams occurs based on the calculated baseline value;
- providing an abnormality indication in response to the determination that the abnormality has occurred;
- and
- determining, in response to the abnormality indication, whether a source of the abnormality is in the multi-beam system.
4 more elements
A system for monitoring performance of a multi-beam system, the system comprising:
- a controller having a circuitry to execute a set of instructions to cause the system to:
- monitor a performance metric of at least two beams of a plurality of beams of the multi-beam system operating simultaneously during an imaging process, wherein the performance metric of the at least two beams comprises an image parameter or geometric distortion of a first image generated from the imaging process from a field of view (FOV) of a first beam of the at least two beams of the plurality of beams and a second image generated from the imaging process of a FOV of a second beam of the at least two beams of the plurality of beams, and wherein the image parameter comprises a noise parameter, an image sharpness parameter, or a resolution parameter;
- receive records of the performance metric of the plurality of beams of the multi-beam system during the imaging process, each record associated with a beam of the plurality of beams;
- calculate a baseline value of the performance metric for the plurality of beams from a portion of the records;
- determine whether an abnormality of the first beam of the at least two beams of the plurality of beams or the second beam of the at least two beams of the plurality of beams occurs based on the calculated baseline value;
- provide an abnormality indication in response to the determination that the abnormality has occurred;
- and
- determine, in response to the abnormality indication, whether a source of the abnormality is in the multi-beam system.
5 more elements
A non-transitory computer-readable medium that stores a set of instructions that is executable by at least one processor of an apparatus to cause the apparatus to perform a method for monitoring performance of a multi-beam system, the method comprising:
- monitoring a performance metric of at least two beams of a plurality of beams of the multi-beam system operating simultaneously during an imaging process, wherein the performance metric of the at least two beams comprises an image parameter or geometric distortion of a first image generated from the imaging process from a field of view (FOV) of a first beam of the at least two beams of the plurality of beams and a second image generated from the imaging process of a FOV of a second beam of the at least two beams of the plurality of beams, and wherein the image parameter comprises a noise parameter, an image sharpness parameter, or a resolution parameter;
- receiving records of the performance metric of the plurality of beams of the multi-beam system during the imaging process, each record associated with a beam of the plurality of beams;
- calculating a baseline value of the performance metric of the plurality of beams from a portion of the records;
- determining whether an abnormality of the first beam of the at least two beams of the plurality of beams or the second beam of the at least two beams of the plurality of beams occurs based on the calculated baseline value;
- providing an abnormality indication in response to the determination that the abnormality has occurred;
- and
- determining, in response to the abnormality indication, whether a source of the abnormality is in the multi-beam system.
4 more elements
Dependencies are inferred from the claim text.