Wave motion analysis device, scanning device, wave motion analysis system, wave motion analysis method, and program

A wave motion analysis method for detecting a defect of an inspection object on a basis of a reflection wave obtained from the inspection object, the wave motion analysis method comprising:

• acquiring tomographic data generated on a basis of the reflection wave;
• extracting, from the tomographic data, a multiple reflection area that corresponds to a depth range deeper than a depth at which a real image of the inspection object is able to be detected in the tomographic data and in which a multiple reflection signal is able to be detected;
• and
• detecting a multiple reflection image corresponding to the defect of the inspection object from the extracted multiple reflection area,
• wherein, the wave motion analysis method further comprises, in the extracting, designating, as a specific time area, a time area that is equal to or longer than a time in which the reflection wave from an inspection target range of the inspection object reaches and has a predetermined length, and specifying, as the multiple reflection area, an area where image data based on a reflection signal obtained in the specific time area exists in the tomographic data.

A non-transitory recording medium storing a computer readable program that causes a computer to perform a wave motion analysis processing of detecting a defect of an inspection object on a basis of a reflection wave obtained from the inspection object,

• the wave motion analysis processing comprising:
• acquiring tomographic data generated on the basis of the reflection wave;
• extracting, from the tomographic data, a multiple reflection area that corresponds to a depth range deeper than a depth at which a real image of the inspection object is able to be detected in the tomographic data and in which a multiple reflection signal is able to be detected;
• and
• detecting a multiple reflection image corresponding to the defect of the inspection object from the extracted multiple reflection area,
• wherein, the wave motion analysis processing further comprises, in the extracting, designating, as a specific time area, a time area that is equal to or longer than a time in which the reflection wave from an inspection target range of the inspection object reaches and has a predetermined length, and specifying, as the multiple reflection area, an area where image data based on a reflection signal obtained in the specific time area exists in the tomographic data.