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US 12,693,726 B2Granted
Integrated optoelectronic module
AssigneeApple Inc.
InventorsAlexander Shpunt, Raviv Erlich, Zafrir Mor
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Abstract
A beam generating device includes a semiconductor substrate, having an optical passband. A first array of vertical-cavity surface-emitting lasers (VCSELs) is formed on a first face of the semiconductor substrate and are configured to emit respective laser beams through the substrate at a wavelength within the passband. A second array of microlenses is formed on a second face of the semiconductor substrate in respective alignment with the VCSELs so as to transmit the laser beams generated by the VCSELs.
Claims18
A beam generating device, comprising:
- a semiconductor substrate, having an optical passband;
- a first array of vertical-cavity surface-emitting lasers (VCSELs), which are formed on a first face of the semiconductor substrate and are configured to emit respective laser beams through the substrate at a wavelength within the passband;
- a second array of microlenses, which are formed on a second face of the semiconductor substrate, opposite the first face, in alignment with respective ones of the VCSELs so as to transmit the laser beams generated by the VCSELs;
- and
- a lens positioned to receive and transmit the laser beams output from the second array of microlenses,
- wherein at least some of the microlenses in the second array are offset along the second face of the semiconductor substrate by different, respective offsets relative to the respective ones of the VCSELs so as to cause the respective laser beams to be transmitted toward the lens at different respective angles.
3 more elements
A method for producing a beam generating device, comprising:
- forming a first array of vertical-cavity surface-emitting lasers (VCSELs) on a first face of a semiconductor substrate so that the VCSELs emit respective laser beams through the substrate at a wavelength within an optical passband of the substrate;
- forming a second array of microlenses on a second face of the semiconductor substrate, opposite the first face, in alignment with respective ones of the VCSELs so as to transmit the laser beams generated by the VCSELs;
- and
- positioning a lens to receive and transmit the laser beams output from the second array of microlenses,
- wherein forming the second array comprises offsetting at least some of the microlenses in the second array along the second face of the semiconductor substrate by different, respective offsets relative to the respective ones of the VCSELs so as to cause the respective laser beams to be transmitted toward the lens at different respective angles.
2 more elements
Dependencies are inferred from the claim text.