System and method for substrate processing using models at multiple layers

A model management method of a model management system, comprising:

• managing, by a first management device, a model at a predetermined layer among layers, the layers being three or more layers;
• managing, by one or more second management devices, one or more models at a layer one level lower than the predetermined layer,
• wherein the managing of the model at the predetermined layer includes:
• when one or more model parameters of the one or more models are updated, calculating a new model parameter based on each of the updated one or more model parameters, and
• performing control so that the new model parameter is set in a plurality of models respectively managed by a plurality of management devices at a lowest layer, the plurality of management devices belonging to the first management device,
• transmitting the new model parameter to a management device that manages a model at a layer one level higher than the model managed by the first management device, and
• wherein the model management system is configured to separately manage models applied to a substrate manufacturing process in the layers,
• wherein the model management method further comprises:
• collecting, by one or more executing devices, data measured while a substrate is processed by a substrate processing device and executing, by the one or more executing devices, a model among the plurality of models based on the collected data to output an inference result;
• and
• transmitting, by the one or more executing devices, to the substrate processing device, an instruction based on the output inference result, the instruction causing the substrate processing device to perform the substrate manufacturing process on the substrate.

A non-transitory computer-readable recording medium having stored therein a model management program causing a computer of a model management system to perform a process comprising:

• managing, by a first management device, a model at a predetermined layer among layers, the layers being three or more layers;
• managing, by one or more second management devices, one or more models at a layer one level lower than the predetermined layer,
• wherein the managing of the model at the predetermined layer includes:
• when one or more model parameters of the one or more models are updated, calculating a new model parameter based on each of the updated one or more model parameters, and
• performing control so that the new model parameter is set in a plurality of models respectively managed by a plurality of management devices at a lowest layer, the plurality of management devices belonging to the first management device,
• transmitting the new model parameter to a management device that manages a model at a layer one level higher than the model managed by the first management device, and
• wherein the model management system is configured to separately manage models applied to a substrate manufacturing process in the layers,
• wherein the process further comprises:
• collecting, by one or more executing devices, data measured while a substrate is processed by a substrate processing device and executing, by the one or more executing devices, a model among the plurality of models based on the collected data to output an inference result;
• and
• transmitting, by the one or more executing devices, to the substrate processing device, an instruction based on the output inference result, the instruction causing the substrate processing device to perform the substrate manufacturing process on the substrate.