Imaging system and a method for imaging a sample
AssigneeImec Vzw
InventorPol Van Dorpe
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Abstract
According to an aspect of the present inventive concept there is provided an imaging system for imaging of a sample, comprising a light source, an interference filter and a detector, the light source generates illumination light of a single wavelength to induce elastic scattering of the light by the sample, the interference filter selectively reduces transmittance of light having an incident angle on the interference filter corresponding to non-scattered light, the detector is configured to detect a two-dimensional representation of the elastically scattered light transmitted by the interference filter.
Claims18
An imaging system for imaging of a sample, said imaging system comprising:
- a light source;
- an interference filter;
- and
- a detector;
- wherein the light source and the interference filter are configured to be arranged on opposite sides of the sample;
- wherein the light source is configured to generate illumination light of a single wavelength for illuminating the sample to induce elastic scattering of the light of the single wavelength by the sample;
- wherein the interference filter is configured to provide transmittance of the single wavelength in dependence of an angle of incident light, wherein the interference filter is configured to selectively reduce transmittance of light having an incident angle on the interference filter corresponding to non-scattered light such that a relative intensity of the elastically scattered light of the single wavelength is increased by the interference filter in relation to non-scattered light of the single wavelength;
- wherein the detector is configured to detect a two-dimensional representation of the elastically scattered light of the single wavelength transmitted by the interference filter.
A method for imaging of a sample, said method comprising the steps of:
- generating light of a single wavelength;
- illuminating the sample with the light of the single wavelength to induce elastic scattering of the light of the single wavelength;
- selectively reducing transmittance of light having an incident angle on an interference filter corresponding to non-scattered light by the interference filter being configured to provide transmittance of the single wavelength in dependence of an angle of incident light, whereby a relative intensity of the elastically scattered light of the single wavelength is increased by the interference filter in relation to the non-scattered light of the single wavelength;
- detecting a two-dimensional representation of the elastically scattered light of the single wavelength transmitted by the interference filter.
Dependencies are inferred from the claim text.