Control voltage threshold selection to facilitate multifocal imaging
AssigneeCymer, Inc.
InventorsMd Hossain Toufiq Imam, Rabin Paudel, Gamaralalage G. Padmabandu
Life of this patent
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Abstract
Disclosed is an apparatus and method for use in a system in which light pulses of different wavelengths are generated by moving an optical element connected to an actuator and in which the actuator is driven by a command voltage having a threshold cap depending on a position of a pulse in a burst of pulses.
Claims18
A laser apparatus adapted to generate a burst of pulses of laser radiation including a first plurality of pulses of laser radiation having a first wavelength interspersed with a second plurality of pulses of laser radiation having a second wavelength different from the first wavelength based at least in part on a position of an optical element in an optical assembly of the laser apparatus, the laser apparatus comprising:
- a trigger for initiating the burst of pulses;
- a pulse counter for providing a running count of a number of pulses that have occurred in the burst of pulses;
- an electro-actuatable element (EAE) mechanically coupled to the optical element to control the position of the optical element under control of a voltage command signal;
- and
- a voltage controller electrically connected to the EAE;
- wherein the voltage controller is arranged to receive the running count from the pulse counter, the voltage controller is adapted to generate the voltage command signal, the voltage controller is configured to apply a first voltage cap to the voltage command signal from when the burst is initiated to when the running count is at a first predetermined value, and the voltage controller is configured to apply a second voltage cap to the voltage command signal after the running count exceeds the first predetermined value.
A laser apparatus adapted to generate a first plurality of pulses of laser radiation having a first wavelength interspersed with a second plurality of pulses of laser radiation having a second wavelength different from the first wavelength based at least in part on a position of an optical element in an optical assembly of the laser apparatus, the laser apparatus comprising:
- an electro-actuatable element (EAE) mechanically coupled to the optical element and configured to adjust a position of the optical element under control of a command signal, wherein the respective wavelengths of pulses in the burst of pulses are based at least in part on the position of the optical element;
- and
- a controller electrically connected to the EAE and arranged to receive a running count of a number of pulses that have occurred since the start of a burst of pulses and adapted to generate the command signal, the controller being adapted to change a signal cap applied to the command signal based at least in part on the running count.
A method of operating a laser apparatus adapted to generate a burst of pulses of laser radiation including a first plurality of pulses of laser radiation having a first wavelength interspersed with a second plurality of pulses of laser radiation having a second wavelength different from the first wavelength based at least in part on a position of an optical element in an optical assembly of the laser apparatus, the position of the optical element being determined by an electro-actuatable element (EAE) mechanically coupled to the optical element, the method comprising:
- generating the burst of pulses, and, simultaneously with generating the burst of pulses;
- counting a number of pulses that have occurred in the burst of pulses to provide a running count of the pulses;
- and
- generating a command voltage for the EAE, the command voltage having a voltage cap based at least in part on the running count.
A laser apparatus adapted to generate a burst of pulses of laser radiation including a first plurality of pulses of laser radiation having a first wavelength interspersed with a second plurality of pulses of laser radiation having a second wavelength different from the first wavelength based at least in part on a position of an optical element in an optical assembly of the laser apparatus, the laser apparatus comprising:
- an electro-actuatable element (EAE) mechanically coupled to the optical element to control the position of the optical element;
- and
- a voltage controller electrically connected to the EAE;
- wherein the voltage controller is adapted and configured to generate a voltage command signal to control a position of the EAE, the voltage control signal having a first voltage cap when the EAE is at an end of an undershoot region of its voltage response behavior and a second voltage cap different from the first voltage cap when the EAE is at an end of an overshoot region of its voltage response behavior.
Dependencies are inferred from the claim text.