Optical waveguide device, and optical modulation device and optical transmission apparatus using same
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsKosuke Okahashi, Yu Kataoka
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Abstract
An optical waveguide device includes an optical waveguide formed on a substrate, in which an optical modulator section that modulates a light wave propagating through the optical waveguide is formed in a part of the optical waveguide, in which a first dielectric layer covers the optical waveguide, and a second dielectric layer formed of a different material from the first dielectric layer is disposed on the first dielectric layer in a part of the optical waveguide excluding the optical modulator section.
Claims7
An optical waveguide device including a protruding optical waveguide formed on a substrate with a thickness of 1 μm or less, in which an optical modulator section that modulates a light wave propagating through the protruding optical waveguide is formed in a part of the protruding optical waveguide,
- wherein a first dielectric layer covers all of the protruding optical waveguide,
- a second dielectric layer formed of a different material from the first dielectric layer is disposed on the first dielectric layer and is not formed anywhere in the optical modulator section,
- a thickness of the first dielectric layer is 1 μm or less,
- a thickness of the second dielectric layer is 2 μm or greater, and
- a Young's modulus of the second dielectric layer is less than a Young's modulus of the first dielectric layer.
Dependencies are inferred from the claim text.