Integrated photodetector with embedded semiconductor region
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-Chun Huang, Stefan Rusu
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTai-Chun Huang, Stefan Rusu
Estimating the term…
In some embodiments, the present disclosure provides an optical module. A waveguide includes a rib, and further includes a first protrusion and a second protrusion respectively on opposite sides of the rib. Further, the waveguide is formed of a first semiconductor material. A photodetector is in the waveguide and comprises a PN junction in the rib. A P type region of the PN junction extends to the first protrusion, and an N type region of the PN junction extends to the second protrusion. Further, the first and second protrusions accommodate heavily doped P and N type contact regions. A semiconductor region is on the PN junction. The semiconductor region comprises a second semiconductor material different the first semiconductor material. For example, the second semiconductor material may have a smaller bandgap than the first semiconductor material to enhance quantum efficiency.
An optical module, comprising:
An optical module, comprising:
An integrated device, comprising:
Dependencies are inferred from the claim text.