Non-line-of-sight deposition of coating on internal components of assembled device
AssigneeApplied Materials, Inc.
InventorsAlexander Berger, Cheng-Hsuan Chou, David Knapp
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AssigneeApplied Materials, Inc.
InventorsAlexander Berger, Cheng-Hsuan Chou, David Knapp
Estimating the term…
Described herein is a method of depositing a conformal, optically transparent coating onto a surface of one or more internal components that are enclosed within an assembled device including an optical encoder using a non-line-of-sight deposition process without altering a structure of the assembled device or impacting functionality of the assembled device. Also described is an assembled device including an optical encoder, where one or more internal components enclosed within the optical encoder and a coating deposited onto a surface of the internal components, where the coating is a conformal, optically transparent coating that is resistant to corrosion by at least one of fluorine-, chlorine-, sulfur-, hydrogen-, bromine-, or nitrogen-based acids and that does not negatively impact functionality of the internal components.
A method comprising:
An article comprising:
An article comprising an assembled device comprising an optical encoder, wherein the optical encoder comprises one or more internal components enclosed within an interior of the optical encoder and an optical window in a wall of the optical encoder, wherein the one or more internal components capture a position of an object external to the assembled device in accordance with a type associated with the optical encoder, and a coating deposited onto a surface of the internal components enclosed within the optical encoder, wherein the coating is a conformal, optically transparent coating, the article having been manufactured by a process comprising:
Dependencies are inferred from the claim text.