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US 12,693,313 B2Granted
Testing device, testing method, and non-transitory storage medium storing testing program
AssigneeSumitomo Electric Industries, Ltd.
InventorsKosuke Fujii, Koichi Koyama
Life of this patent
Estimating the term…
Abstract
A testing device includes a contactless measurement unit configured to measure a thickness of a test object and a probe needle configured to move by a distance in accordance with the thickness measured by the measurement unit to come into contact with an electrode of the test object.
Claims11
A testing apparatus comprising:
- (a) a stage having an upper surface and configured to support a test object that includes an electrode having an upper surface;
- (b) a probe assembly including a probe needle having a tip;
- (c) a motor-driven actuator mechanically coupled to the probe assembly and configured to move the probe needle along a vertical axis toward and away from the stage;
- (d) a laser displacement sensor oriented to direct laser light to the electrode and to output measurement data indicative of a distance from the laser displacement sensor to the upper surface of the electrode;
- and
- (e) a controller comprising a processor and a non-transitory memory storing instructions that, when executed by the processor, cause the controller to:
- (i) with the probe needle positioned above the stage and separated from the test object, control the laser displacement sensor to measure a thickness T defined as a distance from the upper surface of the stage to the upper surface of the electrode;
- (ii) determine a movement amount P according to P=D1−T+D2, where D1 is a stored distance from the tip to the upper surface of the stage when the probe needle is positioned above the stage and separated from the test object, and D2 is a predetermined overdrive amount;
- and
- (iii) drive the motor-driven actuator to move the probe needle by the movement amount P such that the tip contacts the electrode and, after contact, advances by the predetermined overdrive amount to slide on a surface of the electrode toward a central portion of the electrode.
7 more elements
A testing method comprising:
- supporting, on a stage having an upper surface, a test object
- including an electrode having an upper surface;
- positioning a probe needle above the stage and separated from the test object;
- directing laser light from a laser displacement sensor to the electrode and outputting measurement data indicative of a distance from the laser displacement sensor to the upper surface of the electrode;
- measuring, based on the measurement data, a thickness T defined as a distance from the upper surface of the stage to the upper surface of the electrode;
- determining a movement amount P according to P=D1−T+D2, where D1 is a stored distance from a tip of the probe needle to the upper surface of the stage when the probe needle is positioned above the stage and separated from the test object, and D2 is a predetermined overdrive amount;
- and
- driving a motor-driven actuator mechanically coupled to a probe assembly to move the probe needle by the movement amount P such that the tip contacts the electrode and, after contact, advances by the predetermined overdrive amount to slide on a surface of the electrode toward a central portion of the electrode.
5 more elements
A non-transitory storage medium storing a testing program for causing a computer to function as:
- a measurement control unit configured to control a laser displacement sensor to direct laser light to an electrode of a test object and to output measurement data indicative of a distance from the laser displacement sensor to an upper surface of the electrode, and to measure, based on the measurement data, a thickness T defined as a distance from an upper surface of a stage to the upper surface of the electrode;
- and
- a movement control unit configured to determine a movement amount P according to P=D1−T+D2, where D1 is a stored distance from a tip of a probe needle to the upper surface of the stage when the probe needle is positioned above the stage and separated from the test object, and D2 is a predetermined overdrive amount, and to drive a motor-driven actuator to move the probe needle by the movement amount P such that the tip contacts the electrode and, after contact, advances by the predetermined overdrive amount to slide on a surface of the electrode toward a central portion of the electrode.
Dependencies are inferred from the claim text.