Physical quantity sensor and inertial measurement unit

A physical quantity sensor that detects, when three directions orthogonal to one another are defined as a first direction, a second direction, and a third direction, a physical quantity in the third direction, the physical quantity sensor comprising:

• a fixed portion fixed at a substrate;
• a support beam having one end coupled to the fixed portion and provided along the second direction;
• a movable body coupled to the other end of the support beam;
• and
• a first fixed electrode portion and a second fixed electrode portion which are provided at the substrate, wherein
• the movable body includes
• a first coupling portion coupled to the other end of the support beam and extending from the support beam in the first direction,
• a first base portion coupled to the first coupling portion and provided along the second direction,
• a first movable electrode portion including a first movable electrode, the first movable electrode extending from the first base portion in the first direction and facing a first fixed electrode of the first fixed electrode portion in the second direction,
• a second coupling portion coupled to the other end of the support beam and extending from the support beam in a fourth direction opposite to the first direction,
• a second base portion coupled to the second coupling portion and provided along the second direction,
• a second movable electrode portion including a second movable electrode, the second movable electrode extending from the second base portion in the first direction and facing a second fixed electrode of the second fixed electrode portion in the second direction, and
• a third fixed electrode portion and a fourth fixed electrode portion which are provided at the substrate,
• wherein
• the first movable electrode portion and the second movable electrode portion are provided at symmetrical positions in the first direction with respect to the support beam, and
• the movable body further includes
• a third base portion coupled to the first coupling portion and provided along the second direction,
• a third movable electrode portion including a third movable electrode, the third movable electrode extending from the third base portion in the fourth direction and facing a third fixed electrode of the third fixed electrode portion in the second direction,
• a fourth base portion coupled to the second coupling portion and provided along the second direction, and
• a fourth movable electrode portion including a fourth movable electrode, the fourth movable electrode extending from the fourth base portion in the fourth direction and facing a fourth fixed electrode of the fourth fixed electrode portion in the second direction.