Surface analysis method and surface analysis apparatus

Abstract

A surface analysis apparatus includes: an ion irradiation unit configured to irradiate a surface of a solid sample with an ion stream of a specific ion species having a preset value of kinetic energy at a predetermined incident angle; an observation unit configured to observe scattered ions that originate from the ion stream and have undergone a charge transfer reaction with an atom or molecule present on a surface of the solid sample; and an information calculation unit configured to obtain information on electrical properties or physical properties on a surface of the solid sample on the basis of an observation result of the scattered ions in the observation unit. As a result, it is possible to efficiently acquire, in a short time, the distribution of the information on the electrical properties or physical properties such as the surface potential of the solid sample.

Dependencies are inferred from the claim text.