X-ray fluorescence analyzer

An energy dispersive X-ray fluorescence analyzer for analyzing a sample, comprising:

• a sample stage configured to place the sample thereon;
• a first housing mounted on a first face of the sample stage, the sample being placed on the first face, the first housing forming a sample chamber together with the sample stage;
• an X-ray tube;
• a detector configured to detect fluorescent X-rays emitted from the sample when the sample in the sample chamber is irradiated with primary X-rays emitted from the X-ray tube;
• and
• a vacuum adjuster comprising a pump, a valve and a vacuum gauge, the vacuum adjuster being configured to set a degree of vacuum in the sample chamber,
• wherein the vacuum adjuster is configured to set the degree of vacuum in the sample chamber during analysis of the sample to be a lower degree of vacuum when the sample is liquid than a degree of vacuum when the sample is solid,
• further comprising a controller configured to control the vacuum adjuster,
• wherein the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample to be a lower degree of vacuum when the sample is liquid than a degree of vacuum when the sample is solid, and
• wherein when the sample is liquid including a solvent, the controller is configured to set the degree of vacuum in the sample chamber during the analysis of the sample so as to correspond to a type of solvent of the sample.