Measurement device, measurement system, and measurement method

A measurement system comprising:

• a measurement device including
• an X-ray irradiation section configured to irradiate an object with X-rays,
• an X-ray detection section configured to detect scattered X-rays emitted from the object through the irradiation with the X-rays, and
• an analysis section configured to analyze a plurality of diffraction images obtained through photoelectric conversion of the scattered X-rays and estimate a three-dimensional shape of a measurement region of the object irradiated with the X-rays;
• and
• an information processing device configured to estimate, from shape data obtained by performing measurement in advance at a plurality of positions of the object, an in-plane distribution of the shape data in the object,
• wherein a first film formed of a first material and a second film formed of a second material that is different from the first material are stacked in the measurement region of the object, and a recessed portion that penetrates through the second film and reaches inside of the first film is formed at a part of the measurement region,
• the shape data includes at least one of a film thickness of the second film, a minimum dimension of the recessed portion inside the second film, a dimension of the recessed portion at an interface between the first film and the second film, a center profile of the recessed portion, an inclination level of the recessed portion, or a maximum dimension of the recessed portion inside the first film,
• the analysis section estimates a three-dimensional shape of the recessed portion on the basis of the plurality of diffraction images acquired while an irradiation angle of the X-rays with respect to the object is changed and the shape data inputted from the information processing device, and
• the information processing device extracts the shape data at a position of the measurement region from the in-plane distribution and inputs the shape data to the measurement device.

A measurement method comprising:

• detecting scattered X-rays emitted from an object through irradiation with X-rays while an irradiation angle of the X-rays with respect to the object is changed;
• performing photoelectric conversion on the scattered X-rays and acquiring a plurality of diffraction images for each irradiation angle;
• and
• estimating a three-dimensional shape of a measurement region of the object irradiated with the X-rays on the basis of the plurality of diffraction images and shape data obtained by measuring the object in advance,
• wherein a first film formed of a first material and a second film formed of a second material that is different from the first material are stacked in the measurement region of the object, and a recessed portion that penetrates through the second film and reaches inside of the first film is formed at a part of the measurement region, and
• the shape data includes a film thickness of the second film, a minimum dimension of the recessed portion inside the second film, and a dimension of the recessed portion at an interface between the first film and the second film.