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US 12,693,212 B2Granted
Measuring device for absorption-spectroscopic gas measurement, use of spinel, polycrystalline aluminum oxide or aluminum oxynitride and method for absorption-spectroscopic gas measurement
AssigneeM & C TechGroup Germany GmbH
InventorsJohann Georges des Aulnois, Michael Lohr, Hans-Jorg Rumm
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Abstract
The invention relates to a measuring device for absorption-spectroscopic gas measurement, the use of spinel, polycrystalline aluminum oxide or aluminum oxynitride and a method for absorption-spectroscopic gas measurement.
Claims14
A measuring device for absorption-spectroscopic gas measurement, comprising:
- a radiation device configured to generate a laser beam;
- a reflective element configured to reflect the generated laser beam;
- at least one detection element configured to detect the reflected laser beam;
- a first optical axis along which the generated laser beam is guided to the reflective element;
- and
- a second optical axis along which the reflected laser beam is guided to the at least one detection element,
- wherein the reflective element is selected from the group consisting of spinel, polycrystalline aluminum oxide, and aluminum oxynitride, and
- wherein the reflective element has a coating selected from the group consisting of Al2O3/SiO2, TiO2/Al2O3, TiO2/SiO2, Ta2O5, and MgF2.
5 more elements
A method of reflecting a laser beam in a measuring device for absorption-spectroscopic gas measurement, the method comprising:
- providing a reflective element to reflect the laser beam, the reflective element being selected from the group consisting of spinel, polycrystalline aluminum oxide, and aluminum oxynitride,
- wherein the reflective element has a coating selected from the group consisting of Al2O3/SiO2, TiO2/Al2O3, TiO2/SiO2, Ta2O5, and MgF2.
A method for absorption-spectroscopic gas measurement, comprising:
- A. providing a measuring device for the absorption-spectroscopic gas measurement, the measuring device including a radiation device, a reflective element configured to reflect a laser beam generated by the radiation device, at least one detection element configured to detect the reflected laser beam, a first optical axis along which the generated laser beam is guided to the reflective element, and a second optical axis along which the reflected laser beam is guided to the at least one detection element, the reflective element being selected from the group consisting of spinel, polycrystalline aluminum oxide, and aluminum oxynitride;
- B. generating, via the radiation device, the laser beam;
- C. detecting, via the at least one detection element, the generated laser beam;
- and
- D. conducting, based on the detecting of the generated laser beam, a gas measurement, wherein the reflective element has a coating selected from the group consisting of Al2O3/SiO2, TiO2/Al2O3, TiO2/SiO2, Ta2O5, and MgF2.
2 more elements
Dependencies are inferred from the claim text.