Test apparatus
AssigneeDisco Corporation
InventorMakoto Kobayashi
Life of this patent
Estimating the term…
Abstract
A test apparatus includes a support base that supports an undersurface of a chip, a pressing unit that presses the chip supported by the support base, and a load measuring instrument that measures a load applied when the pressing unit presses the chip. The pressing unit includes a first test indenter that performs a three-point bending test by pressing the chip supported by the support base and a second test indenter that performs a four-point bending test by pressing the chip supported by the support base, and the first test indenter and the second test indenter are configured to be selectable when the chip supported by the support base is pressed by the pressing unit.
Claims5
A test apparatus comprising:
- a support base configured to support a lower surface of a test piece;
- a pressing unit configured to press the test piece supported by the support base;
- and
- a load measuring instrument configured to measure a load applied when the pressing unit presses the test piece;
- the pressing unit including
- a first test indenter configured to perform a first test by pressing a first test piece supported by the support base, and
- a second test indenter configured to perform a second test different from the first test by pressing a second test piece supported by the support base;
- and
- the first test indenter and the second test indenter being configured to be selectable when the first test piece or the second test piece supported by the support base is pressed by the pressing unit.
Dependencies are inferred from the claim text.