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US 12,693,168 B2Granted
Bolometer and method for manufacturing the same
AssigneeNEC Corporation
InventorTomo Tanaka
Life of this patent
Estimating the term…
Abstract
A flexible and high-performance bolometer and a method for manufacturing the same are disclosed. The bolometer has (a) a light detector including a bolometer film, and (b) a resin exterior enclosing the light detector; the resin exterior including (b1) a base material layer formed of a resin having a thermal conductivity of 0.3 W/mK or less, and (b2) a protective layer formed of a resin having a thermal conductivity of 0.3 W/mK or less and an infrared transmittance of 70% or more.
Claims10
A bolometer comprising
- (a) a light detector including a bolometer film, and
- (b) a resin exterior enclosing the light detector;
- the resin exterior including (b1) a base material layer formed of a resin having a thermal conductivity of 0.3 W/mK or less, and (b2) a protective layer formed of a resin having a thermal conductivity of 0.3 W/mK or less and an infrared transmittance of 70% or more,
- wherein the base material layer is not supported by a support formed of an inorganic or organic material.
1 more element
A method of manufacturing a bolometer comprising:
- forming a base material layer by a resin having a thermal conductivity of 0.3 W/mK or less on a support;
- forming an under layer on the base material layer;
- forming a bolometer film on the under layer;
- forming two electrodes so as to be connected to the bolometer film to form a light detector including the bolometer film and the electrodes;
- and
- forming a protective layer having a thermal conductivity of 0.3 W/mK or less and an infrared transmittance of 70% or more in such a manner that the protective layer covers the light detector and bonds directly to the base material layer around the light detector, whereby the base material layer and the protective layer together form a resin exterior enclosing the light detector;
- forming a groove outside of the outer periphery of the light detection part to the depth of the surface of the support;
- and
- separating from the support the light detector enclosed by the resin exterior comprising the base material layer and the protective layer.
6 more elements
Dependencies are inferred from the claim text.