Microelectromechanical gyroscope with detection of angular velocity along a vertical axis

A device, comprising:

• a microelectromechanical gyroscope that includes:
• a substrate;
• a movable structure, suspended above the substrate, the movable structure includes:
• a rotor anchor, integral with the substrate at an anchoring area;
• at least one drive mass having a window and coupled to the rotor anchor;
• at least one bridge element, cantilevered suspended with respect to the substrate and extending within the window;
• and
• movable electrodes carried by the bridge element within the window;
• and
• a detection structure on the substrate with a top surface, the detection structure includes:
• stator electrodes, in the window in an interdigitated configuration with the movable electrodes, the stator electrodes being below the bridge element, at a certain separation distance from the bridge element, which extends longitudinally above the stator electrodes;
• wherein the detection structure comprises a first and a second stator elements, arranged within the window, on opposite sides with respect to the bridge element, in suspended configuration above the substrate and integrally coupled to the substrate through a respective first and second stator anchors arranged at the anchoring area, in proximity of the rotor anchor;
• the first and second stator elements carrying first, respectively second, electrodes of the stator electrodes.

An electronic device, comprising:

• a microelectromechanical gyroscope that includes:
• a detection structure having a substrate with a top surface parallel to a horizontal plane;
• and
• a movable structure, suspended above the substrate and configured to perform, as a function of an angular velocity around a vertical axis, orthogonal to the horizontal plane, a sense movement along a first horizontal axis of the horizontal plane, in the presence of a drive movement along a second horizontal axis of the horizontal plane, orthogonal to the first horizontal axis the movable structure includes:
• at least one drive mass internally defining a window and elastically coupled to a rotor anchor, integral with the substrate at an anchoring area, through elastic anchoring elements;
• at least one bridge element, rigid and of a conductive material, cantilevered suspended with respect to the substrate and extending within the window, elastically coupled to the drive mass;
• and
• movable electrodes, integrally carried by the bridge element within the window;
• and
• wherein the detection structure further comprises stator electrodes, arranged in the window in an interdigitated configuration with the movable electrodes, the stator electrodes being arranged below the bridge element, at a certain separation distance from the bridge element, which extends longitudinally above the stator electrodes;
• wherein the detection structure further comprises a first and a second stator elements, arranged within the window, on opposite sides with respect to the bridge element, in suspended configuration above the substrate and integrally coupled to the substrate through a respective first and second stator anchors arranged at the anchoring area, in proximity of the rotor anchor;
• the first and second stator elements carrying first, respectively second, electrodes of the stator electrodes.