Heat treatment device and method of manufacturing display panel using the same
AssigneeSamsung Display Co., Ltd.
InventorsMinsu Kim, Dong-Wook Song, Hongrok Jang
Life of this patent
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Abstract
A heat treatment device includes a chamber accommodating a work substrate including a first organic layer, a heater part which is disposed in the chamber and heats the work substrate, an air supply part including a first nozzle which supplies an external air to the chamber, a second nozzle which is disposed in the first nozzle and supplies a process gas to the chamber, and a cover part provided through which an opening overlapping the second nozzle is defined and which is disposed at an end of the first nozzle, which is adjacent to an outlet of the first nozzle, and an air exhaust part exhausting particles in the chamber to an outside of the chamber.
Claims17
A heat treatment device comprising:
- a chamber accommodating a work substrate comprising a first organic layer;
- a heater part which is disposed in the chamber and heats the work substrate;
- an air supply part comprising:
- a first nozzle which supplies an external air to the chamber;
- a second nozzle which is disposed in the first nozzle and supplies a process gas to the chamber;
- and
- a cover part through which an opening overlapping the second nozzle is defined and which is disposed at an end of the first nozzle which is adjacent to an outlet of the first nozzle;
- and
- an air exhaust part which exhausts particles in the chamber to an outside of the chamber,
- wherein the opening is defined only at a central portion of the cover part, and no other openings are defined in a remaining portion of the cover part.
Dependencies are inferred from the claim text.