Regulator assembly and test method
AssigneeEntegris, Inc.
InventorsEdward E. Jones, Sarah A. Utz, Joseph R. Despres
Life of this patent
Estimating the term…
Abstract
Regulator assemblies can be tested using test fluids selected to have a molecular weight about that of a selected fluid to be dispensed from a fluid storage and delivery vessel including the regulator assembly. The test fluid can be a single gas or a mixture. The test fluid can have a molecular weight of between 80% and 110% of the molecular weight of the selected fluid dispensed from the fluid storage and delivery vessel. Regulator assemblies tested in this manner can pass evaluation when they show fewer than two spikes on the initiation of flow of the test gas. These regulator assemblies can be installed into fluid storage and delivery vessels, particularly for storage and delivery of pressurized fluids.
Claims15
A regulator assembly for a fluid supply container for a selected fluid, comprising:
- a first regulator configured to receive the selected fluid and having an outlet pressure set to a predetermined set point;
- and
- a second regulator configured to receive the selected fluid from the first regulator at or near the outlet pressure of the first regulator and to further reduce the outlet pressure so as to supply the selected fluid to a tool;
- wherein the predetermined set point of the outlet pressure of the first regulator is an outlet pressure that produces fewer than two spikes in a flow through the second regulator when the regulator assembly is operated with a test fluid, the test fluid having a molecular weight that is between 80% and 110% of a molecular weight of the selected fluid;
- and
- wherein the test fluid is not supplied to the tool.
A method of testing a regulator, comprising:
- introducing a test fluid into a plurality of test regulator assemblies, wherein
- each of the plurality of test regulator assemblies includes a first regulator and a second regulator, and
- the test fluid has a molecular weight that is between 80% and 110% of a molecular weight of a selected fluid;
- flowing the test fluid from the first regulator to the second regulator of each of the plurality of test regulator assemblies;
- monitoring a flow of the test fluid through the second regulator of each of the plurality of test regulator assemblies;
- determining a number of spikes in the monitored flow through the second regulator for each of the plurality of test regulator assemblies;
- and
- selecting a regulator assembly for a fluid supply package, the regulator assembly selected from one of the plurality of test regulator assemblies having a second regulator that exhibited fewer than two spikes in the monitored flow when the second regulator received the test fluid at or near the outlet pressure of a first regulator.
Dependencies are inferred from the claim text.