Fluid control device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYutoku Kawabata, Nobuhira Tanaka
Life of this patent
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Abstract
A fluid control device includes a first main plate, a second main plate, a driving body, a frame body, a plurality of support bodies, a plurality of gaps, a side wall member, a valve film, and a fixing member. A pump chamber is formed by a flat plate part consisting of the first main plate, the frame body, and the plurality of support bodies, and the second main plate and the side wall member. The valve film is disposed on a main surface of the first main plate on the side where the pump chamber is located. The valve film has an annular shape and fixed to the first main plate by the fixing member so that an outer end thereof is a movable end. The outer end of the valve film overlaps the plurality of gaps located between the plurality of support portions in plan view.
Claims20
A fluid control device comprising:
- a first main plate having a first main surface and a second main surface;
- a second main plate having a third main surface facing the first main surface and a fourth main surface on an opposite side from the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and through which a fluid flows;
- a driving body disposed on the second main surface and causing the first main plate to vibrate;
- a frame body provided at an outer side than an outer edge of the first main plate;
- support portions connecting the frame body and the first main plate to each other and supporting the first main plate to allow the first main plate to vibrate relative to the frame body;
- a side wall member connecting the second main plate and the frame body to each other and providing a pump chamber between the first main surface and the third main surface;
- a valve member including a flexible circular valve film and a fixing member, the fixing member fixing the circular valve film to the first main surface, the valve member having an outer end being a movable end;
- and
- a second hole surrounded by an outer edge of the first main plate, the frame body, and two of the support portions adjacent to each other, allowing communication between an inside of the pump chamber and an outside of the pump chamber, and through which the fluid passes,
- wherein an outer end of the valve member overlaps the second hole when the first main surface is seen in plan view.
A fluid control device comprising:
- a first main plate having a first main surface and a second main surface;
- a second main plate having a third main surface facing the first main surface and a fourth main surface on an opposite side from the third main surface, and having a first hole penetrating between the third main surface and the fourth main surface and through which a fluid flows;
- a driving body disposed on the second main surface and causing the first main plate to vibrate;
- a frame body provided at an outer side than an outer edge of the first main plate;
- support portions connecting the frame body and the first main plate to each other and supporting the first main plate to allow the first main plate to vibrate relative to the frame body;
- a side wall member connecting the second main plate and the frame body to each other and providing a pump chamber between the first main surface and the third main surface;
- a valve member including a flexible circular valve film and a fixing member, the fixing member fixing the circular valve film to the first main surface, the valve member having an outer end being a movable end;
- and
- a second hole surrounded by an outer edge of the first main plate, the frame body, and two of the support portions adjacent to each other, allowing communication between an inside of the pump chamber and an outside of the pump chamber, and through which the fluid passes,
- wherein a recess recessed from the first main surface is provided in a part of the first main surface overlapping an outer end of the valve member when the first main surface is seen in plan view.
Dependencies are inferred from the claim text.