Vacuum pump
AssigneeEdwards Japan Limited
InventorsShigeyoshi Nakatsuji, Yoshiyuki Takai, Haruki Suzuki
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AssigneeEdwards Japan Limited
InventorsShigeyoshi Nakatsuji, Yoshiyuki Takai, Haruki Suzuki
Estimating the term…
There is obtained a vacuum pump which suppresses an influence on external piping caused by a contact failure of a rotor during rotation of the rotor. A temperature rise ring 301 is provided in the vacuum pump, an outlet port 133 to which the external piping is connected is connected to the temperature rise ring 301, and a rotational force is directly or indirectly applied to the temperature rise ring 301 due to the contact failure of the rotor during the rotation of the rotor. In addition, a rotation suppression means (a hole 301a and a bolt 305) for suppressing rotation of the temperature rise ring 301 by the above-described rotational force is provided separately from a connection portion between the temperature rise ring 301 and a casing (outer tube 127a).
A vacuum pump comprising:
A vacuum pump comprising:
Dependencies are inferred from the claim text.