Plating apparatus and plating method
AssigneeEbara Corporation
InventorsYusui Goto, Kazuhito Tsuji, Mizuki Nagai
Life of this patent
Estimating the term…
Abstract
Provided are a plating apparatus and the like capable of improving the uniformity of a plating film formed on a substrate. The plating apparatus includes a plating tank, a substrate holder for holding a substrate, an anode holder disposed in the plating tank to face the substrate held in the substrate holder, the anode holder being configured to hold a soluble anode, an anode mask attached to the anode holder, the anode mask having an opening through which a current flowing between the anode and the substrate passes, an adjustment mechanism configured to adjust an opening dimension of the anode mask, and a controller that controls the adjustment mechanism based on an amount of electrolysis in the anode while the anode is in use.
Claims7
A plating apparatus comprising:
- a plating tank;
- a substrate holder for holding a substrate;
- an anode holder disposed in the plating tank to face the substrate held in the substrate holder, the anode holder being configured to hold a soluble anode;
- an anode mask attached to the anode holder, the anode mask having an opening through which a current flowing between the anode and the substrate passes;
- an adjustment mechanism configured to adjust an opening dimension of the anode mask;
- and
- a controller that controls the adjustment mechanism based on an amount of electrolysis in the anode while the anode is in use.
A plating method in a plating apparatus,
- the plating apparatus comprising:
- a plating tank;
- a substrate holder for holding a substrate;
- an anode holder disposed in the plating tank to face the substrate held in the substrate holder, the anode holder being configured to hold a soluble anode;
- and
- an anode mask attached to the anode holder, the anode mask having an opening through which a current flowing between the anode and the substrate passes,
- the plating method comprising:
- calculating an amount of electrolysis in the anode while the anode is in use;
- and
- adjusting an opening dimension of the anode mask based on the calculated amount of electrolysis.
Dependencies are inferred from the claim text.