Apparatus and system for delivering gas to a process chamber

A process system, comprising:

• a process chamber comprising a substrate support;
• a gas assembly, the gas assembly comprising:
• a manifold with a first major surface and a second major surface opposing the first major surface, and an opening extending through the manifold from the first major surface to the second major surface;
• one or more gas passages formed in the manifold and in fluid communication with a process volume of the process chamber, the one or more gas passages coupled to the opening by one or more nozzles;
• a deflector, extending from a surface of the manifold, comprising one or more outlets of the one or more nozzles to a surface of the opening of the manifold, wherein the one or more nozzles are oriented towards the deflector, wherein the deflector comprises a hood having a top surface and a backboard supporting the hood, wherein the hood is perpendicular to the one or more nozzles and the top surface is substantially parallel and coplanar to the surface of the opening, wherein the deflector comprises a plurality of fins, each fin of the plurality of fins separating adjacent outlets of the one or more outlets, wherein the manifold is coupled to the process chamber at the second major surface;
• and
• a mainframe door coupled to the manifold at the first major surface.

A gas flow system comprising:

• a manifold comprising a first major surface, a second major surface, an opening extending from the first major surface to the second major surface, and one or more plenums disposed within the manifold between the first major surface and the second major surface, each of the plenums comprising one or more nozzles, the one or more nozzles in fluid communication with the second major surface;
• a deflector, extending from a surface of the manifold, comprising one or more outlets of the one or more nozzles to a surface of the opening of the manifold, wherein the deflector comprises a hood having a top surface and a backboard supporting the hood, wherein the hood is perpendicular to the one or more nozzles and the top surface is substantially parallel and coplanar to the surface of the opening, wherein the deflector comprises a plurality of fins, each fin of the plurality of fins separating adjacent outlets of the one or more outlets;
• one or more gas lines extending from a third surface of the manifold to the one or more plenums, wherein at least two of the gas lines are independently controlled;
• a transfer system mainframe door coupled to the first major surface;
• and
• a process chamber comprising a chamber opening, wherein the chamber opening is in fluid communication with the one or more nozzles.