Method for suppressing collapse of three-dimensional structure

A method for suppressing collapse of a three-dimensional structure comprising:

• preparing a substrate having a patterned three-dimensional structure on the surface thereof, and
• contacting a surface treatment liquid to the surface of the three-dimensional structure, wherein, the surface treatment liquid comprises a silane condensate (A), and an organic solvent (S),
• the silane condensate (A) is a condensate formed by hydrolyzation condensation of a hydrolyzable silane compound comprising a trifunctional silane compound (A1) represented by the following formula (A1-1):
• SiRa1(Ra2)3 (A1-1)
• wherein, in the formula (A1-1), Ra1 is a hydrocarbon group having 1 or more and 20 or less carbon atoms, Ra2 is a group capable of forming a silanol group by hydrolysis, and three Ra2s may be the same as or different from each other,
• a concentration of the silane condensate (A) in the surface treatment liquid is 0.00005% by mass or more and 40% by mass or less,
• a total content of a trimer, a tetramer, and a pentamer in each oligomer in the silane condensate (A) is 50% by area or more and 100% by area or less with respect to a total area of the silane condensate (A),
• a content of the tetramer in the silane condensate (A) is 30% by area or more and 70% by area or less with respect to the total area of the silane condensate (A), and
• the % by area is an area percentage for each oligomer in an obtained chromatogram, when the silane condensate (A) is analyzed by gel permeation chromatography (GPC).