Large-sized hollow porous quartz glass preform and method of manufacturing the same

Abstract

Provided are such a method of manufacturing a hollow synthetic quartz glass porous preform and method of manufacturing a synthetic quartz glass cylinder as described below: even a soot body having an outer diameter of more than 300 mm can be produced without significantly increasing a load on an apparatus, such as a centrifugal force generated during growth; even when manufactured at low-speed rotation, the soot body is free of any crack or rupture; and a target can be easily extracted. Specifically, provided is a method of manufacturing a hollow porous quartz glass preform by an OVD method, wherein the rotation peripheral speed of the soot body is controlled so as to be practically constant by fluctuating the rotation number of the soot body on the basis of a fluctuating outer diameter of the soot body during growth, and wherein a frequency factor γ calculated by the following equation is set so as to fall within the range of 0.13≤γ<1.0 in a range in which the outer diameter of the soot body is more than 250 mm: γ=S/(L·Nm), where S represents the moving speed (mm/min) of the burners, L represents the moving distance (mm) of the burners, and Nm represents the lowest value (rpm) of the rotation number of the soot body, which is fluctuated.

Dependencies are inferred from the claim text.