Functional aqueous solution supply apparatus

Abstract

Functional aqueous solution supply apparatus (1) has a replenishment water production unit (3) that is supplied with ultrapure water (W) from a pipe conduit (2) and produces functional aqueous solution as washing water (W1), a storage tank (5) that is supplied/replenished with the produced washing water (W1) via a pipe (4), and a circulation pipe conduit (7) that supplies the washing water (W1) from the storage tank (5) to single-wafer type washers (6A, 6B, 6C, and 6D) and returns unused washing water (W1) to the storage tank (5). The circulation pipe conduit (7) is branched into supply pipes (7A, 7B, 7C, and 7D) and is further connected to return pipes (8A, 8B, 8C, and 8D) that communicate into the circulation pipe conduit (7) from the washers (6A, 6B, . . . ), respectively. The operation plan of the washers (6A, 6B, . . . ) is preliminarily transmitted to a control means (9), and this control means (9) can control the replenishment water production unit (3). Such a functional aqueous solution supply apparatus can supply the functional aqueous solution as the washing water to use points such as washing apparatuses for electronic components/electronic members, etc.

Dependencies are inferred from the claim text.