High purity cordierite material for semiconductor applications
AssigneeHeraeus Covantics North America LLC
InventorsLuke Walker, Saurav Bista, Matthew Joseph Donelon, Steven Roger Kennedy
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Abstract
Disclosed is a cordierite sintered body comprising from 90 to 98% by volume of a cordierite crystal phase as measured using x ray diffraction, SEM and image processing methods wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods. The cordierite sintered body has a Young's modulus of about 125 GPa or greater, and volumetric porosity of less than about 4%. Methods of making the cordierite sintered body are also disclosed.
Claims18
A cordierite sintered body comprising:
- wherein the cordierite sintered body has at least one surface comprising pores having a diameter of from 0.1 to 5 um as measured using SEM and image processing methods, wherein the cordierite sintered body comprises a cordierite crystal phase in an amount by volume of from about 95% to about 98% and a sapphirine crystal phase in an amount of from about 2% to about 5% measured using x ray diffraction, SEM and image processing methods, and the cordierite sintered body having a Young's modulus of from 125 to 140 GPa, as measured in accordance with ASTM E1876-15.
Dependencies are inferred from the claim text.