Substrate storage container
AssigneeShin-Etsu Polymer Co., Ltd.
InventorHiroki Yamagishi
Life of this patent
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AssigneeShin-Etsu Polymer Co., Ltd.
InventorHiroki Yamagishi
Estimating the term…
Provided is a substrate storage container that can eliminate lower coupling strength between a slide member and bent locking member, and bent locking member falling from the slide member without a metal pin. The container includes a lid fitted to an open front face of a container body, and locking mechanism that locks the lid. The locking mechanism includes an operating reel supported on the lid and turned by external operation, connecting bar that slides to vertical direction of the lid as the reel turns, locking claw projected from a passage opening in the periphery of the lid as the connecting bar slides and can be engaged with a locking pocket on front inner circumference of the container body. The locking claw is coupled rotatably at distal part of the connecting bar by a resin pin which can reduce generation of metal ions and eliminate adverse effects on semiconductor wafers.
A substrate container comprising:
A substrate storage container comprising:
A substrate storage container comprising:
Dependencies are inferred from the claim text.