Protection film, method for affixing same, and method for manufacturing semiconductor component
AssigneeMitsui Chemicals Ict Materia, Inc.
InventorsMasao Nogami, Akimitsu Morimoto
Life of this patent
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Abstract
Provided are a method for affixing a protective film, a method for manufacturing a semiconductor component, and a protective film for use in the affixing method, which are capable of suppressing occurrence of a failure caused by a step on a main surface of a semiconductor wafer. The affixing method includes: an arrangement step of arranging a protective film so as to cover a main surface A of a semiconductor wafer; and an affixing step of pressing the protective film against the main surface to affix the protective film to the main surface. The affixing step includes a compression step of compressing the protective film in a thickness direction thereof.
Claims5
A method for affixing a protective film, comprising:
- an arrangement step of arranging a protective film so as to cover a main surface of a semiconductor wafer;
- and
- an affixing step of pressing the protective film against the main surface to affix the protective film to the main surface, characterized in,
- that the main surface has a first region in which bumps are arranged and a second region which includes at least a part of a peripheral edge of the main surface and in which no bumps are arranged,
- that the affixing step includes a compression step of compressing the protective film in a thickness direction thereof, and
- that the compression step is performed using a pressing member for pressing the protective film against the main surface and a support member installed along an outer peripheral edge of the second region,
- wherein the arrangement step is a step of arranging the protective film such that an edge part of the protective film is positioned on an inner peripheral side of the support member, and
- wherein the compression step is a step of compressing the edge part of the protective film with the pressing member, an inner peripheral surface of the support member, and the main surface so that the inner peripheral surface of the support member blocks bulging of the protective film in an outer peripheral direction of the second region when the protective film is sandwiched between the pressing member and the main surface.
Dependencies are inferred from the claim text.